Suspended microchannel with integrated temperature sensors for high-pressure flow studies

S. Wu, J. Mai, Y. Zohar, Y. C. Tai, C. M. Ho

Research output: Contribution to conferencePaper

49 Scopus citations

Abstract

A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 μm×21 μm×4400 μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045×10-3N-s/m2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.

Original languageEnglish (US)
Pages87-92
Number of pages6
StatePublished - Jan 1 1998
Externally publishedYes
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: Jan 25 1998Jan 29 1998

Other

OtherProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period1/25/981/29/98

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Suspended microchannel with integrated temperature sensors for high-pressure flow studies'. Together they form a unique fingerprint.

  • Cite this

    Wu, S., Mai, J., Zohar, Y., Tai, Y. C., & Ho, C. M. (1998). Suspended microchannel with integrated temperature sensors for high-pressure flow studies. 87-92. Paper presented at Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Ger, .