Suspended microchannel with integrated temperature sensors for high-pressure flow studies

S. Wu, J. Mai, Yitshak Zohar, Y. C. Tai, C. M. Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

49 Citations (Scopus)

Abstract

A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 μm×21 μm×4400 μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045×10-3N-s/m2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Editors Anon
PublisherIEEE
Pages87-92
Number of pages6
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: Jan 25 1998Jan 29 1998

Other

OtherProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period1/25/981/29/98

Fingerprint

Temperature sensors
Microchannels
Sensors
Thermistors
Flow measurement
Boron
Water
Flow rate
Calibration
Viscosity
Friction
Heating
Temperature

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Wu, S., Mai, J., Zohar, Y., Tai, Y. C., & Ho, C. M. (1998). Suspended microchannel with integrated temperature sensors for high-pressure flow studies. In Anon (Ed.), Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 87-92). IEEE.

Suspended microchannel with integrated temperature sensors for high-pressure flow studies. / Wu, S.; Mai, J.; Zohar, Yitshak; Tai, Y. C.; Ho, C. M.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). ed. / Anon. IEEE, 1998. p. 87-92.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wu, S, Mai, J, Zohar, Y, Tai, YC & Ho, CM 1998, Suspended microchannel with integrated temperature sensors for high-pressure flow studies. in Anon (ed.), Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, pp. 87-92, Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Ger, 1/25/98.
Wu S, Mai J, Zohar Y, Tai YC, Ho CM. Suspended microchannel with integrated temperature sensors for high-pressure flow studies. In Anon, editor, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE. 1998. p. 87-92
Wu, S. ; Mai, J. ; Zohar, Yitshak ; Tai, Y. C. ; Ho, C. M. / Suspended microchannel with integrated temperature sensors for high-pressure flow studies. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). editor / Anon. IEEE, 1998. pp. 87-92
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N2 - A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 μm×21 μm×4400 μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045×10-3N-s/m2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.

AB - A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 μm×21 μm×4400 μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045×10-3N-s/m2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.

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