Swing arm optical CMM

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.

Original languageEnglish (US)
Title of host publicationProceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009
Pages20-25
Number of pages6
Volume45
StatePublished - 2009
EventASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009 - Albuquerque, NM, United States
Duration: Apr 6 2009Apr 7 2009

Other

OtherASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009
CountryUnited States
CityAlbuquerque, NM
Period4/6/094/7/09

Fingerprint

Coordinate measuring machines
Topography
Mirrors
Engineering facilities
Sensors
Fabrication
Geometry

ASJC Scopus subject areas

  • Engineering (miscellaneous)

Cite this

Su, P., Oh, C. J., Parks, R. E., & Burge, J. H. (2009). Swing arm optical CMM. In Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009 (Vol. 45, pp. 20-25)

Swing arm optical CMM. / Su, Peng; Oh, Chang Jin; Parks, Robert E.; Burge, James H.

Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009. Vol. 45 2009. p. 20-25.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Su, P, Oh, CJ, Parks, RE & Burge, JH 2009, Swing arm optical CMM. in Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009. vol. 45, pp. 20-25, ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009, Albuquerque, NM, United States, 4/6/09.
Su P, Oh CJ, Parks RE, Burge JH. Swing arm optical CMM. In Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009. Vol. 45. 2009. p. 20-25
Su, Peng ; Oh, Chang Jin ; Parks, Robert E. ; Burge, James H. / Swing arm optical CMM. Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009. Vol. 45 2009. pp. 20-25
@inproceedings{b38ef6c815e246c08707f96f2c74d7da,
title = "Swing arm optical CMM",
abstract = "A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.",
author = "Peng Su and Oh, {Chang Jin} and Parks, {Robert E.} and Burge, {James H}",
year = "2009",
language = "English (US)",
isbn = "9781887706490",
volume = "45",
pages = "20--25",
booktitle = "Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009",

}

TY - GEN

T1 - Swing arm optical CMM

AU - Su, Peng

AU - Oh, Chang Jin

AU - Parks, Robert E.

AU - Burge, James H

PY - 2009

Y1 - 2009

N2 - A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.

AB - A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.

UR - http://www.scopus.com/inward/record.url?scp=84884317557&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884317557&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884317557

SN - 9781887706490

VL - 45

SP - 20

EP - 25

BT - Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009

ER -