Swing arm optical CMM

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.

Original languageEnglish (US)
Title of host publicationProceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009
Pages20-25
Number of pages6
StatePublished - Dec 1 2009
EventASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009 - Albuquerque, NM, United States
Duration: Apr 6 2009Apr 7 2009

Publication series

NameProceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009
Volume45

Other

OtherASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009
CountryUnited States
CityAlbuquerque, NM
Period4/6/094/7/09

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ASJC Scopus subject areas

  • Engineering (miscellaneous)

Cite this

Su, P., Oh, C. J., Parks, R. E., & Burge, J. H. (2009). Swing arm optical CMM. In Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009 (pp. 20-25). (Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009; Vol. 45).