Swing arm optical CMM: Self calibration with dual probe shear test

Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8126
DOIs
StatePublished - 2011
EventOptical Manufacturing and Testing IX - San Diego, CA, United States
Duration: Aug 22 2011Aug 24 2011

Other

OtherOptical Manufacturing and Testing IX
CountryUnited States
CitySan Diego, CA
Period8/22/118/24/11

Fingerprint

Self-calibration
Coordinate measuring machines
Bearings (structural)
Probe
Calibration
shear
probes
In Situ Measurements
profilometers
gas bearings
Topography
in situ measurement
Mirror
topography
apertures
mirrors
Air

Keywords

  • Aspherics
  • Optical testing
  • Shear test
  • SOC
  • Stitching
  • Swing arm profilometer

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Su, P., Wang, Y., Oh, C. J., Parks, R. E., & Burge, J. H. (2011). Swing arm optical CMM: Self calibration with dual probe shear test. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8126). [81260W] https://doi.org/10.1117/12.894203

Swing arm optical CMM : Self calibration with dual probe shear test. / Su, Peng; Wang, Yuhao; Oh, Chang Jin; Parks, Robert E.; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8126 2011. 81260W.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Su, P, Wang, Y, Oh, CJ, Parks, RE & Burge, JH 2011, Swing arm optical CMM: Self calibration with dual probe shear test. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8126, 81260W, Optical Manufacturing and Testing IX, San Diego, CA, United States, 8/22/11. https://doi.org/10.1117/12.894203
Su P, Wang Y, Oh CJ, Parks RE, Burge JH. Swing arm optical CMM: Self calibration with dual probe shear test. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8126. 2011. 81260W https://doi.org/10.1117/12.894203
Su, Peng ; Wang, Yuhao ; Oh, Chang Jin ; Parks, Robert E. ; Burge, James H. / Swing arm optical CMM : Self calibration with dual probe shear test. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8126 2011.
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