Swing arm optical CMM: Self calibration with dual probe shear test

Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Scopus citations

Abstract

Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing IX
DOIs
StatePublished - Nov 28 2011
EventOptical Manufacturing and Testing IX - San Diego, CA, United States
Duration: Aug 22 2011Aug 24 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8126
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing IX
CountryUnited States
CitySan Diego, CA
Period8/22/118/24/11

Keywords

  • Aspherics
  • Optical testing
  • SOC
  • Shear test
  • Stitching
  • Swing arm profilometer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Su, P., Wang, Y., Oh, C. J., Parks, R. E., & Burge, J. H. (2011). Swing arm optical CMM: Self calibration with dual probe shear test. In Optical Manufacturing and Testing IX [81260W] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8126). https://doi.org/10.1117/12.894203