Swing-arm optical coordinate measuring machine: Modal estimation of systematic errors from dual probe shear measurements

Peng Su, Robert E. Parks, Yuhao Wang, Chang Jin Oh, James H. Burge

Research output: Contribution to journalReview articlepeer-review

13 Scopus citations

Abstract

The swing-arm optical coordinate measuring machine (SOC), a profilometer with a distance-measuring interferometric probe for in situ measurement of the topography of aspheric surfaces,has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe, self-calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from modal estimation of the sheared signal.

Original languageEnglish (US)
Article number043604
JournalOptical Engineering
Volume51
Issue number4
DOIs
StatePublished - Apr 1 2012

Keywords

  • aspherics
  • optical testing
  • profilometry
  • shear test
  • stitching
  • swing-arm profilometer

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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