Swing-arm profilometry of aspherics

David S. Anderson, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

43 Scopus citations

Abstract

A profilometer is described that utilizes the swing-arm geometry to provide surface profile measurements of large, highly aspheric surfaces. The profilometer measurement is shown to be robust against stiffness and alignment induced errors in the probe motion.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages169-179
Number of pages11
StatePublished - Dec 1 1995
EventOptical Manufacturing and Testing - San Diego, CA, USA
Duration: Jul 9 1995Jul 11 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2536
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing
CitySan Diego, CA, USA
Period7/9/957/11/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Anderson, D. S., & Burge, J. H. (1995). Swing-arm profilometry of aspherics. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 169-179). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2536).