Swing-arm profilometry of aspherics

David S. Anderson, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

42 Citations (Scopus)

Abstract

A profilometer is described that utilizes the swing-arm geometry to provide surface profile measurements of large, highly aspheric surfaces. The profilometer measurement is shown to be robust against stiffness and alignment induced errors in the probe motion.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages169-179
Number of pages11
Volume2536
StatePublished - 1995
EventOptical Manufacturing and Testing - San Diego, CA, USA
Duration: Jul 9 1995Jul 11 1995

Other

OtherOptical Manufacturing and Testing
CitySan Diego, CA, USA
Period7/9/957/11/95

Fingerprint

profilometers
Profilometry
Surface measurement
Stiffness
Geometry
stiffness
alignment
probes
profiles
geometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Anderson, D. S., & Burge, J. H. (1995). Swing-arm profilometry of aspherics. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2536, pp. 169-179)

Swing-arm profilometry of aspherics. / Anderson, David S.; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2536 1995. p. 169-179.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Anderson, DS & Burge, JH 1995, Swing-arm profilometry of aspherics. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2536, pp. 169-179, Optical Manufacturing and Testing, San Diego, CA, USA, 7/9/95.
Anderson DS, Burge JH. Swing-arm profilometry of aspherics. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2536. 1995. p. 169-179
Anderson, David S. ; Burge, James H. / Swing-arm profilometry of aspherics. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2536 1995. pp. 169-179
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