Abstract
The use of simulated annealing is proposed for automatic design of electrostatic lenses with given first-order properties and minimum aberrations. The synthesis of a high-quality lens for focusing an ion beam produced by a liquid-metal source is shown as an example.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 5087-5089 |
| Number of pages | 3 |
| Journal | Journal of Applied Physics |
| Volume | 66 |
| Issue number | 10 |
| DOIs | |
| State | Published - Dec 1 1989 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)