Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - Sep 1995|
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