Synthesis of electrostatic multielectrode deflectors

Research output: Contribution to journalArticle

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Abstract

Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.

Original languageEnglish (US)
Pages (from-to)1988-1993
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number5
DOIs
StatePublished - Sep 1995

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Electrostatics
Aberrations
Splines

ASJC Scopus subject areas

  • Engineering(all)

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Synthesis of electrostatic multielectrode deflectors. / Cho, H.; Szilagyi, Miklos N.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 13, No. 5, 09.1995, p. 1988-1993.

Research output: Contribution to journalArticle

@article{f39499c9aecc40338e56deaee75a89ba,
title = "Synthesis of electrostatic multielectrode deflectors",
abstract = "Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.",
author = "H. Cho and Szilagyi, {Miklos N}",
year = "1995",
month = "9",
doi = "10.1116/1.588120",
language = "English (US)",
volume = "13",
pages = "1988--1993",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "5",

}

TY - JOUR

T1 - Synthesis of electrostatic multielectrode deflectors

AU - Cho, H.

AU - Szilagyi, Miklos N

PY - 1995/9

Y1 - 1995/9

N2 - Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.

AB - Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.

UR - http://www.scopus.com/inward/record.url?scp=0029369421&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029369421&partnerID=8YFLogxK

U2 - 10.1116/1.588120

DO - 10.1116/1.588120

M3 - Article

AN - SCOPUS:0029369421

VL - 13

SP - 1988

EP - 1993

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 1071-1023

IS - 5

ER -