Synthesis of electrostatic multielectrode deflectors

H. Cho, M. Szilagyi

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Synthesis of electrostatic deflectors with given source parameters, first-order properties, and minimum aberrations can be realized by using the cubic spline method or the a priori given multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on the a priori given multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third-order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.

Original languageEnglish (US)
Pages (from-to)1988-1993
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number5
DOIs
StatePublished - Sep 1 1995

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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