SYSTEMATIC ANALYSIS OF SYMMETRIC THREE-ELECTRODE ELECTROSTATIC LENSES.

Research output: Contribution to journalArticle

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Abstract

A thorough investigation of a class of axially symmetric three-electrode einzel lenses is given. The study is based on the analysis of axial potential distributions. Two different central/outer voltage ratios are examined. The spherical and chromatic aberration coefficients of a large class of lens models are calculated and plotted. For both voltage ratios, general conclusions are drawn for the axial potential functions and electrode shapes that have small aberration coefficients. An electrostatic lens with small spherical aberration is given. General criteria are established for the design of symmetric three-electrode lenses.

Original languageEnglish (US)
JournalIEEE Transactions on Electron Devices
VolumeED-34
Issue number12
StatePublished - Dec 1987

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Electrostatic lenses
Aberrations
Lenses
lenses
electrostatics
aberration
Electrodes
electrodes
Electric potential
electric potential
coefficients

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

SYSTEMATIC ANALYSIS OF SYMMETRIC THREE-ELECTRODE ELECTROSTATIC LENSES. / Szilagyi, Miklos N; Szep, Jeno.

In: IEEE Transactions on Electron Devices, Vol. ED-34, No. 12, 12.1987.

Research output: Contribution to journalArticle

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