Systems-level integration for focused beam scatterometry

Steven R. Gillmer, Stephen T. Head, Michael J. Theisen, Thomas G. Brown, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2015 Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages120-125
Number of pages6
ISBN (Electronic)9781887706698
StatePublished - Jan 1 2015
Externally publishedYes
Event30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 - Austin, United States
Duration: Nov 1 2015Nov 6 2015

Publication series

NameProceedings - ASPE 2015 Annual Meeting

Conference

Conference30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015
CountryUnited States
CityAustin
Period11/1/1511/6/15

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Gillmer, S. R., Head, S. T., Theisen, M. J., Brown, T. G., & Ellis, J. D. (2015). Systems-level integration for focused beam scatterometry. In Proceedings - ASPE 2015 Annual Meeting (pp. 120-125). (Proceedings - ASPE 2015 Annual Meeting). American Society for Precision Engineering, ASPE.