Testing of a micro Faraday cup array for ion detection in SIMS

Jan Lorincik, M. Bonner Denton, Roger P. Sperline, Erick T. Young, Peter Williams

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either O+2 or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si±, SiH±, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level ~230 counts/s.

Original languageEnglish (US)
Pages (from-to)1050-1057
Number of pages8
JournalAnalytical Letters
Volume44
Issue number6
DOIs
StatePublished - Apr 1 2011

Keywords

  • Capacitance transimpedance amplifier
  • Faraday cup
  • Ion detection
  • SIMS

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Spectroscopy
  • Clinical Biochemistry
  • Biochemistry, medical
  • Electrochemistry

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