The Activity of HF/H2O Treated Silicon Surfaces in Ambient Air Before and After Gate Oxidation

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Fingerprint Dive into the research topics of 'The Activity of HF/H<sub>2</sub>O Treated Silicon Surfaces in Ambient Air Before and After Gate Oxidation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science