The diffractive optics calibrator: Design and construction

Wenrui Cai, Ping Zhou, Chunyu Zhao, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We present a new device, the Diffractive Optics Calibrator (DOC), for measuring duty-cycle and etching depth for computer generated holograms (CGH). The system scans the CGH with a collimated laser beam, and collects the far field diffraction pattern with a CCD array. The relative intensities of the various orders of diffraction are used to fit the phase shift from etching and the duty cycle of the binary pattern. The system is capable of measuring variations that cause 1 nm PV phase errors in the wavefront created by the CGH. The measurements will be used primarily for quality control CGHs, but the data can also be used to provide a lookup table for corrections that allow calibration of the lithography errors. Such calibration may be necessary for us to achieve our goal of measuring freeform aspheric surfaces with 1 nm RMS accuracy.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8839
DOIs
StatePublished - 2013
Event2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications - San Diego, CA, United States
Duration: Aug 25 2013Aug 26 2013

Other

Other2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications
CountryUnited States
CitySan Diego, CA
Period8/25/138/26/13

Fingerprint

Diffractive optics
Diffractive Optics
diffractive optics
Hologram
Holograms
Etching
Diffraction
Calibration
Aspheric Surface
Cycle
Phase Error
Free-form Surface
Table lookup
Look-up Table
etching
Wavefronts
Quality Control
Far Field
Phase Shift
Lithography

Keywords

  • Computer-generated holograms
  • Duty-cycle
  • Etching depth
  • Instrumentation
  • Quality control

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Cai, W., Zhou, P., Zhao, C., & Burge, J. H. (2013). The diffractive optics calibrator: Design and construction. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8839). [883907] https://doi.org/10.1117/12.2023524

The diffractive optics calibrator : Design and construction. / Cai, Wenrui; Zhou, Ping; Zhao, Chunyu; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8839 2013. 883907.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cai, W, Zhou, P, Zhao, C & Burge, JH 2013, The diffractive optics calibrator: Design and construction. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8839, 883907, 2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications, San Diego, CA, United States, 8/25/13. https://doi.org/10.1117/12.2023524
Cai W, Zhou P, Zhao C, Burge JH. The diffractive optics calibrator: Design and construction. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8839. 2013. 883907 https://doi.org/10.1117/12.2023524
Cai, Wenrui ; Zhou, Ping ; Zhao, Chunyu ; Burge, James H. / The diffractive optics calibrator : Design and construction. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8839 2013.
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