The diffractive optics calibrator: Design and construction

Wenrui Cai, Ping Zhou, Chunyu Zhao, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We present a new device, the Diffractive Optics Calibrator (DOC), for measuring duty-cycle and etching depth for computer generated holograms (CGH). The system scans the CGH with a collimated laser beam, and collects the far field diffraction pattern with a CCD array. The relative intensities of the various orders of diffraction are used to fit the phase shift from etching and the duty cycle of the binary pattern. The system is capable of measuring variations that cause 1 nm PV phase errors in the wavefront created by the CGH. The measurements will be used primarily for quality control CGHs, but the data can also be used to provide a lookup table for corrections that allow calibration of the lithography errors. Such calibration may be necessary for us to achieve our goal of measuring freeform aspheric surfaces with 1 nm RMS accuracy.

Original languageEnglish (US)
Title of host publicationDimensional Optical Metrology and Inspection for Practical Applications II
DOIs
StatePublished - Nov 28 2013
Event2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications - San Diego, CA, United States
Duration: Aug 25 2013Aug 26 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8839
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications
CountryUnited States
CitySan Diego, CA
Period8/25/138/26/13

Keywords

  • Computer-generated holograms
  • Duty-cycle
  • Etching depth
  • Instrumentation
  • Quality control

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Cai, W., Zhou, P., Zhao, C., & Burge, J. H. (2013). The diffractive optics calibrator: Design and construction. In Dimensional Optical Metrology and Inspection for Practical Applications II [883907] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8839). https://doi.org/10.1117/12.2023524