The effect of wafer shape on slurry film thickness and friction coefficients in chemical mechanical planarization

J. Lu, J. Coppeta, C. Rogers, V. P. Manno, L. Racz, A. Philipossian, M. Moinpour, F. Kaufman

Research output: Contribution to journalConference articlepeer-review

22 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy