Theoretical and experimental investigation of conditioner design factors on tribology and removal rate in copper chemical mechanical planarization

Leonard Borucki, Hyosang Lee, Yun Zhuang, Naoki Nikita, Ryozo Kikuma, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Fingerprint Dive into the research topics of 'Theoretical and experimental investigation of conditioner design factors on tribology and removal rate in copper chemical mechanical planarization'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy