Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio

L. Borucki, H. Lee, Y. Zhuang, Ara Philipossian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The interlayer dielectric (ILD) removal rates, coefficients of friction, and pad flattening ratio of silicon dioxide films were analyzed. Pad and wafer were rotated in the same direction at the same rate at a relative sliding speed of 0.62 m/sec, the pressure applied to the wafer was 20.7 kPa, and polishing timers were 2 min. When no conditioning was applied, the removal rate declined continuously to a very low level in the classical manner of polish rate decay. It was found that the secondary peak grew more quickly if irregular fumed slurry particles were used rather than spherical colloidal particles under otherwise identical loading conditions.

Original languageEnglish (US)
Title of host publicationAIChE Annual Meeting, Conference Proceedings
Pages9741-9748
Number of pages8
StatePublished - 2004
Event2004 AIChE Annual Meeting - Austin, TX, United States
Duration: Nov 7 2004Nov 12 2004

Other

Other2004 AIChE Annual Meeting
CountryUnited States
CityAustin, TX
Period11/7/0411/12/04

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Friction
Polishing
Silica

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Borucki, L., Lee, H., Zhuang, Y., & Philipossian, A. (2004). Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio. In AIChE Annual Meeting, Conference Proceedings (pp. 9741-9748)

Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio. / Borucki, L.; Lee, H.; Zhuang, Y.; Philipossian, Ara.

AIChE Annual Meeting, Conference Proceedings. 2004. p. 9741-9748.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Borucki, L, Lee, H, Zhuang, Y & Philipossian, A 2004, Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio. in AIChE Annual Meeting, Conference Proceedings. pp. 9741-9748, 2004 AIChE Annual Meeting, Austin, TX, United States, 11/7/04.
Borucki L, Lee H, Zhuang Y, Philipossian A. Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio. In AIChE Annual Meeting, Conference Proceedings. 2004. p. 9741-9748
Borucki, L. ; Lee, H. ; Zhuang, Y. ; Philipossian, Ara. / Theoretical and experimental investigation of ILD removal rates, coefficient of friction, and pad flattening ratio. AIChE Annual Meeting, Conference Proceedings. 2004. pp. 9741-9748
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