Thermal, tribological and kinetic ramifications of ceria slurry dilution and dispense methods in STI CMP

Ruochen Han, Matthew Bahr, Yasa Sampurno, Leonard Borucki, Ara Philipossian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationICPT 2017 - International Conference on Planarization/CMP Technology
PublisherVDE Verlag GmbH
Pages119
Number of pages1
ISBN (Electronic)9783800744626
StatePublished - 2017
Event2017 International Conference on Planarization/CMP Technology, ICPT 2017 - Leuven, Belgium
Duration: Oct 11 2017Oct 13 2017

Publication series

NameICPT 2017 - International Conference on Planarization/CMP Technology

Conference

Conference2017 International Conference on Planarization/CMP Technology, ICPT 2017
CountryBelgium
CityLeuven
Period10/11/1710/13/17

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials

Cite this