Thin-film chemical sensors with waveguide Zeeman interferometry

P. Äyräs, S. Honkanen, K. M. Grace, K. Shrouf, P. Katila, M. Leppihalme, A. Tervonen, X. Yang, B. Swanson, N. Peyghambarian

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

We describe a highly sensitive chemical sensor scheme using a Si3N4 channel waveguide with a selective surface coating based on polarimetric Zeeman interferometry. The sensing is based on measurement of the phase difference between TE and TM modes propagating in the anisotropic waveguide structure under exposure to toluene vapour. A real-time and reversible response at low ppm level is observed. Modelling results of the sensor structure to further increase its sensitivity are presented.

Original languageEnglish (US)
Pages (from-to)1261-1271
Number of pages11
JournalPure and Applied Optics (Print edition) (United Kingdom)
Volume7
Issue number6
DOIs
StatePublished - Nov 1 1998

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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  • Cite this

    Äyräs, P., Honkanen, S., Grace, K. M., Shrouf, K., Katila, P., Leppihalme, M., Tervonen, A., Yang, X., Swanson, B., & Peyghambarian, N. (1998). Thin-film chemical sensors with waveguide Zeeman interferometry. Pure and Applied Optics (Print edition) (United Kingdom), 7(6), 1261-1271. https://doi.org/10.1088/0963-9659/7/6/006