Thin film waveguide sensors for chemical detection

P. Ayras, D. F. Geraghty, S. Honkanen, K. M. Grace, B. Swanson, K. Shrouf, X. Yang, P. Katila, M. Leppihalme, A. Tervonen, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Chemical sensor scheme based on selective sensing surfaces and highly sensitive integrated optical transduction is presented. Self-assembly techniques are used to covalently attach species selective films onto the surface of silicon nitride waveguides. Exposure to targeted analytes results in selective absorption of these molecules onto the waveguide surface causing a change in the effective refractive index of the guided modes. These relative changes in effective refractive indices of TM and TE modes are using Zeeman interferometry. The measurements demonstrate reversible, real-time sensing of volatile organic compounds at ppm level. Improvements in the waveguide design are proposed to further increase the sensor performance.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsM. Fallahi, R.J. Nordstrom
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages310-316
Number of pages7
Volume3537
StatePublished - 1999

Fingerprint

Chemical detection
chemical detection
Waveguides
waveguides
Thin films
sensors
Refractive index
Sensors
thin films
refractivity
volatile organic compounds
Chemical sensors
Silicon nitride
Volatile organic compounds
Interferometry
silicon nitrides
Self assembly
self assembly
interferometry
Molecules

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Ayras, P., Geraghty, D. F., Honkanen, S., Grace, K. M., Swanson, B., Shrouf, K., ... Peyghambarian, N. N. (1999). Thin film waveguide sensors for chemical detection. In M. Fallahi, & R. J. Nordstrom (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3537, pp. 310-316). Society of Photo-Optical Instrumentation Engineers.

Thin film waveguide sensors for chemical detection. / Ayras, P.; Geraghty, D. F.; Honkanen, S.; Grace, K. M.; Swanson, B.; Shrouf, K.; Yang, X.; Katila, P.; Leppihalme, M.; Tervonen, A.; Peyghambarian, Nasser N.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / M. Fallahi; R.J. Nordstrom. Vol. 3537 Society of Photo-Optical Instrumentation Engineers, 1999. p. 310-316.

Research output: Chapter in Book/Report/Conference proceedingChapter

Ayras, P, Geraghty, DF, Honkanen, S, Grace, KM, Swanson, B, Shrouf, K, Yang, X, Katila, P, Leppihalme, M, Tervonen, A & Peyghambarian, NN 1999, Thin film waveguide sensors for chemical detection. in M Fallahi & RJ Nordstrom (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 3537, Society of Photo-Optical Instrumentation Engineers, pp. 310-316.
Ayras P, Geraghty DF, Honkanen S, Grace KM, Swanson B, Shrouf K et al. Thin film waveguide sensors for chemical detection. In Fallahi M, Nordstrom RJ, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3537. Society of Photo-Optical Instrumentation Engineers. 1999. p. 310-316
Ayras, P. ; Geraghty, D. F. ; Honkanen, S. ; Grace, K. M. ; Swanson, B. ; Shrouf, K. ; Yang, X. ; Katila, P. ; Leppihalme, M. ; Tervonen, A. ; Peyghambarian, Nasser N. / Thin film waveguide sensors for chemical detection. Proceedings of SPIE - The International Society for Optical Engineering. editor / M. Fallahi ; R.J. Nordstrom. Vol. 3537 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 310-316
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