TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators

C. C. Ma, Z. J. Wu, Q. P. Sun, Yitshak Zohar, M. Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Hong Kong Electron Devices Meeting
Pages84-87
Number of pages4
StatePublished - 1999
Externally publishedYes
Event1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99) - Shatin, Hong Kong
Duration: Jun 26 1999Jun 26 1999

Other

Other1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99)
CityShatin, Hong Kong
Period6/26/996/26/99

Fingerprint

Shape memory effect
Actuators
Thin films
Sensors
Frequency response
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ma, C. C., Wu, Z. J., Sun, Q. P., Zohar, Y., & Wong, M. (1999). TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators. In Proceedings of the IEEE Hong Kong Electron Devices Meeting (pp. 84-87)

TiNi shape memory alloy thin film rotating actuator topic D : sensors and actuators. / Ma, C. C.; Wu, Z. J.; Sun, Q. P.; Zohar, Yitshak; Wong, M.

Proceedings of the IEEE Hong Kong Electron Devices Meeting. 1999. p. 84-87.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ma, CC, Wu, ZJ, Sun, QP, Zohar, Y & Wong, M 1999, TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators. in Proceedings of the IEEE Hong Kong Electron Devices Meeting. pp. 84-87, 1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99), Shatin, Hong Kong, 6/26/99.
Ma CC, Wu ZJ, Sun QP, Zohar Y, Wong M. TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators. In Proceedings of the IEEE Hong Kong Electron Devices Meeting. 1999. p. 84-87
Ma, C. C. ; Wu, Z. J. ; Sun, Q. P. ; Zohar, Yitshak ; Wong, M. / TiNi shape memory alloy thin film rotating actuator topic D : sensors and actuators. Proceedings of the IEEE Hong Kong Electron Devices Meeting. 1999. pp. 84-87
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