TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators

C. C. Ma, Z. J. Wu, Q. P. Sun, Y. Zohar, M. Wong

Research output: Contribution to conferencePaper

1 Scopus citations

Abstract

The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.

Original languageEnglish (US)
Pages84-87
Number of pages4
StatePublished - Dec 1 1999
Externally publishedYes
Event1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99) - Shatin, Hong Kong
Duration: Jun 26 1999Jun 26 1999

Other

Other1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99)
CityShatin, Hong Kong
Period6/26/996/26/99

    Fingerprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ma, C. C., Wu, Z. J., Sun, Q. P., Zohar, Y., & Wong, M. (1999). TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators. 84-87. Paper presented at 1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99), Shatin, Hong Kong, .