Tolerance issues in solid immersion lens systems

Joshua Sseunhyeun Jo, Tom D. Milster

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

Analysis that includes physical optics with diffraction, polarization, and aberration, as well as geometrical optics is used to understand tolerancing of SIL systems. Irradiance distributions inside a simple substrate are explored as the distance between the objective lens and SIL and the radius of curvature of the SIL are varied. Gap-induced aberration is included in the analysis. Irradiance distributions inside a phase-change recoding medium are explored as the decentration of the SIL and angular misalignment of the incident beam onto the objective lens are changed. Reflection characteristics are explored versus air gap heights and the thickness of the recording layer in a magneto-optical medium

Original languageEnglish (US)
Pages (from-to)312-319
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4342
DOIs
StatePublished - Jan 1 2002
Externally publishedYes

Keywords

  • Magneto-optical medium
  • Phase-change medium
  • Reflection coefficient
  • SIL
  • Tolerance
  • Vector diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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