Transient microscopic testing method based on deflectometry

Hanting Gu, Daodang Wang, Zhongming Xie, Ming Kong, Rongguang Liang, Wentao Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

Original languageEnglish (US)
Title of host publicationOptical Design and Testing IX
EditorsYongtian Wang, Pablo Benitez, Osamu Matoba
PublisherSPIE
ISBN (Electronic)9781510630871
DOIs
StatePublished - Jan 1 2019
EventOptical Design and Testing IX 2019 - Hangzhou, China
Duration: Oct 21 2019Oct 22 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11185
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Design and Testing IX 2019
CountryChina
CityHangzhou
Period10/21/1910/22/19

Keywords

  • Large dynamic range
  • Microscopic deflectometry
  • Transient test
  • Wavefront aberration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Gu, H., Wang, D., Xie, Z., Kong, M., Liang, R., & Zhang, W. (2019). Transient microscopic testing method based on deflectometry. In Y. Wang, P. Benitez, & O. Matoba (Eds.), Optical Design and Testing IX [111850R] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11185). SPIE. https://doi.org/10.1117/12.2537149