Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique

Supapan Seraphin, Dan Zhou, G. Teowee, J. M. Boulton, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The microstructures of lead zirconate titanate (PZT) thin films prepared by a sol-gel technique was investigated using transmission electron microscopy (TEM) and transmission electron diffraction. We investigated the microstructure of three sets of thin films with different chemical compositions: PZT 53/47 films with no excess PbO; with excess PbO; and PZT 65/35 with no excess PbO. All samples were fired for 30 minutes at temperatures ranging from 400C to 700C. Incorporation of excess PbO in the 53/47 film fired at 450C resulted in polycrystalline perovskite grains with an average grain size of less than 0.1 μm. Grain boundaries are decorated by 5-10 nm diameter precipitates possibly caused by the segregation of remnant pyrochlore or excess PbO. The films have high values of dielectric constant (up to 2500) when fired at 700C. PZT 65/35 fired at 700C consists of two distinct phases: a fine-grained matrix of pyrochlore, and 10-μm diameter rosettes of perovskite. The correlations between the compositions, the microstructures of the films, and their processing conditions on the one hand, and ferroelectric properties on the others are discussed.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsEdward R. Myers, Bruce A. Tuttle, Seshu B. Desu, Poul K. Larsen
PublisherPubl by Materials Research Society
Pages369-374
Number of pages6
Volume310
StatePublished - 1993
EventProceedings of the 1993 Spring Meeting of the Materials Research Society - San Francisco, CA, USA
Duration: Apr 16 1993Apr 20 1993

Other

OtherProceedings of the 1993 Spring Meeting of the Materials Research Society
CitySan Francisco, CA, USA
Period4/16/934/20/93

Fingerprint

Sol-gels
Transmission electron microscopy
Thin films
Perovskite
Microstructure
Chemical analysis
Electron diffraction
Ferroelectric materials
Precipitates
Grain boundaries
Permittivity
Processing
Temperature
pyrochlore
perovskite

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Seraphin, S., Zhou, D., Teowee, G., Boulton, J. M., & Uhlmann, D. R. (1993). Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique. In E. R. Myers, B. A. Tuttle, S. B. Desu, & P. K. Larsen (Eds.), Materials Research Society Symposium - Proceedings (Vol. 310, pp. 369-374). Publ by Materials Research Society.

Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique. / Seraphin, Supapan; Zhou, Dan; Teowee, G.; Boulton, J. M.; Uhlmann, Donald R.

Materials Research Society Symposium - Proceedings. ed. / Edward R. Myers; Bruce A. Tuttle; Seshu B. Desu; Poul K. Larsen. Vol. 310 Publ by Materials Research Society, 1993. p. 369-374.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Seraphin, S, Zhou, D, Teowee, G, Boulton, JM & Uhlmann, DR 1993, Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique. in ER Myers, BA Tuttle, SB Desu & PK Larsen (eds), Materials Research Society Symposium - Proceedings. vol. 310, Publ by Materials Research Society, pp. 369-374, Proceedings of the 1993 Spring Meeting of the Materials Research Society, San Francisco, CA, USA, 4/16/93.
Seraphin S, Zhou D, Teowee G, Boulton JM, Uhlmann DR. Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique. In Myers ER, Tuttle BA, Desu SB, Larsen PK, editors, Materials Research Society Symposium - Proceedings. Vol. 310. Publ by Materials Research Society. 1993. p. 369-374
Seraphin, Supapan ; Zhou, Dan ; Teowee, G. ; Boulton, J. M. ; Uhlmann, Donald R. / Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique. Materials Research Society Symposium - Proceedings. editor / Edward R. Myers ; Bruce A. Tuttle ; Seshu B. Desu ; Poul K. Larsen. Vol. 310 Publ by Materials Research Society, 1993. pp. 369-374
@inproceedings{25b44be40a35441b8bdaab205d501dcc,
title = "Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique",
abstract = "The microstructures of lead zirconate titanate (PZT) thin films prepared by a sol-gel technique was investigated using transmission electron microscopy (TEM) and transmission electron diffraction. We investigated the microstructure of three sets of thin films with different chemical compositions: PZT 53/47 films with no excess PbO; with excess PbO; and PZT 65/35 with no excess PbO. All samples were fired for 30 minutes at temperatures ranging from 400C to 700C. Incorporation of excess PbO in the 53/47 film fired at 450C resulted in polycrystalline perovskite grains with an average grain size of less than 0.1 μm. Grain boundaries are decorated by 5-10 nm diameter precipitates possibly caused by the segregation of remnant pyrochlore or excess PbO. The films have high values of dielectric constant (up to 2500) when fired at 700C. PZT 65/35 fired at 700C consists of two distinct phases: a fine-grained matrix of pyrochlore, and 10-μm diameter rosettes of perovskite. The correlations between the compositions, the microstructures of the films, and their processing conditions on the one hand, and ferroelectric properties on the others are discussed.",
author = "Supapan Seraphin and Dan Zhou and G. Teowee and Boulton, {J. M.} and Uhlmann, {Donald R}",
year = "1993",
language = "English (US)",
volume = "310",
pages = "369--374",
editor = "Myers, {Edward R.} and Tuttle, {Bruce A.} and Desu, {Seshu B.} and Larsen, {Poul K.}",
booktitle = "Materials Research Society Symposium - Proceedings",
publisher = "Publ by Materials Research Society",

}

TY - GEN

T1 - Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique

AU - Seraphin, Supapan

AU - Zhou, Dan

AU - Teowee, G.

AU - Boulton, J. M.

AU - Uhlmann, Donald R

PY - 1993

Y1 - 1993

N2 - The microstructures of lead zirconate titanate (PZT) thin films prepared by a sol-gel technique was investigated using transmission electron microscopy (TEM) and transmission electron diffraction. We investigated the microstructure of three sets of thin films with different chemical compositions: PZT 53/47 films with no excess PbO; with excess PbO; and PZT 65/35 with no excess PbO. All samples were fired for 30 minutes at temperatures ranging from 400C to 700C. Incorporation of excess PbO in the 53/47 film fired at 450C resulted in polycrystalline perovskite grains with an average grain size of less than 0.1 μm. Grain boundaries are decorated by 5-10 nm diameter precipitates possibly caused by the segregation of remnant pyrochlore or excess PbO. The films have high values of dielectric constant (up to 2500) when fired at 700C. PZT 65/35 fired at 700C consists of two distinct phases: a fine-grained matrix of pyrochlore, and 10-μm diameter rosettes of perovskite. The correlations between the compositions, the microstructures of the films, and their processing conditions on the one hand, and ferroelectric properties on the others are discussed.

AB - The microstructures of lead zirconate titanate (PZT) thin films prepared by a sol-gel technique was investigated using transmission electron microscopy (TEM) and transmission electron diffraction. We investigated the microstructure of three sets of thin films with different chemical compositions: PZT 53/47 films with no excess PbO; with excess PbO; and PZT 65/35 with no excess PbO. All samples were fired for 30 minutes at temperatures ranging from 400C to 700C. Incorporation of excess PbO in the 53/47 film fired at 450C resulted in polycrystalline perovskite grains with an average grain size of less than 0.1 μm. Grain boundaries are decorated by 5-10 nm diameter precipitates possibly caused by the segregation of remnant pyrochlore or excess PbO. The films have high values of dielectric constant (up to 2500) when fired at 700C. PZT 65/35 fired at 700C consists of two distinct phases: a fine-grained matrix of pyrochlore, and 10-μm diameter rosettes of perovskite. The correlations between the compositions, the microstructures of the films, and their processing conditions on the one hand, and ferroelectric properties on the others are discussed.

UR - http://www.scopus.com/inward/record.url?scp=0027885057&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027885057&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0027885057

VL - 310

SP - 369

EP - 374

BT - Materials Research Society Symposium - Proceedings

A2 - Myers, Edward R.

A2 - Tuttle, Bruce A.

A2 - Desu, Seshu B.

A2 - Larsen, Poul K.

PB - Publ by Materials Research Society

ER -