Tribological, kinetic, thermal and flow characteristics of PPS and PEEK retaining rings

X. Wei, A. Philipossian, Y. Sampurno, F. Sudargho, Y. Zhuang, C. Wargo, L. Borucki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Retaining rings, with two designs, made of polyphenylene sulfide (PPS) and polyetheretherketone (PEEK), were subjected to wear tests to quantify their tribological, kinetic, thermal and flow characteristics. White light interferometry was used to precisely measure local wear rates. Additionally, a series of data including shear force, down force, coefficient of friction (COF) and pad surface temperature were captured in-situ using an Araca APD - 500 polisher. The PEEK rings were also subjected to residence time distribution (RTD) tests at various pressures, slurry flow rates and sliding velocities. Based on the open-system reactor design theory, the mean residence time (MRT) was extracted from the corresponding coefficient of friction (COF) vs. polish time curves.

Original languageEnglish (US)
Title of host publicationICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings
PublisherVDE Verlag GmbH
Pages31-35
Number of pages5
ISBN (Electronic)9783800730650
StatePublished - 2007
Event2007 International Conference on Planarization/CMP Technology, ICPT 2007 - Dresden, Germany
Duration: Oct 25 2007Oct 27 2007

Publication series

NameICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings

Conference

Conference2007 International Conference on Planarization/CMP Technology, ICPT 2007
Country/TerritoryGermany
CityDresden
Period10/25/0710/27/07

Keywords

  • CMP
  • COF
  • Chemical mechanical planarization
  • Interferometry
  • MRT
  • Mean residence time
  • PEEK
  • PPS
  • RTD
  • Residence time distribution
  • Retaining ring
  • Shear force

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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