Tribological, thermal and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes

Yubo Jiao, Xiaoyan Liao, Changhong Wu, Siannie Theng, Yun Zhuang, Yasa Sampurno, Michael Goldstein, Ara Philipossian

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12 Scopus citations

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Chemical Compounds

Engineering & Materials Science