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Tribological, thermal and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes
Yubo Jiao, Xiaoyan Liao, Changhong Wu, Siannie Theng, Yun Zhuang, Yasa Sampurno, Michael Goldstein, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
12
Scopus
citations