Tuning of MEMS devices using evolutionary computation and open-loop frequency response

Didier Keymeulen, Wolfgang Fink, Michael I. Ferguson, Chris Peay, Boris Oks, Richard Terrile, Karl Yee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 IEEE Aerospace Conference
DOIs
StatePublished - Dec 1 2005
Event2005 IEEE Aerospace Conference - Big Sky, MT, United States
Duration: Mar 5 2005Mar 12 2005

Publication series

NameIEEE Aerospace Conference Proceedings
Volume2005
ISSN (Print)1095-323X

Other

Other2005 IEEE Aerospace Conference
CountryUnited States
CityBig Sky, MT
Period3/5/053/12/05

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ASJC Scopus subject areas

  • Aerospace Engineering
  • Space and Planetary Science

Cite this

Keymeulen, D., Fink, W., Ferguson, M. I., Peay, C., Oks, B., Terrile, R., & Yee, K. (2005). Tuning of MEMS devices using evolutionary computation and open-loop frequency response. In Proceedings - 2005 IEEE Aerospace Conference [1559562] (IEEE Aerospace Conference Proceedings; Vol. 2005). https://doi.org/10.1109/AERO.2005.1559562