Tuning of MEMS devices using evolutionary computation and open-loop frequency response

Didier Keymeulen, Wolfgang Fink, Michael I. Ferguson, Chris Peay, Boris Oks, Richard Terrile, Karl Yee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

Original languageEnglish (US)
Title of host publicationIEEE Aerospace Conference Proceedings
Volume2005
DOIs
StatePublished - 2005
Externally publishedYes
Event2005 IEEE Aerospace Conference - Big Sky, MT, United States
Duration: Mar 5 2005Mar 12 2005

Other

Other2005 IEEE Aerospace Conference
CountryUnited States
CityBig Sky, MT
Period3/5/053/12/05

Fingerprint

Evolutionary algorithms
Frequency response
MEMS
Gyroscopes
Tuning
Resonators

ASJC Scopus subject areas

  • Aerospace Engineering

Cite this

Keymeulen, D., Fink, W., Ferguson, M. I., Peay, C., Oks, B., Terrile, R., & Yee, K. (2005). Tuning of MEMS devices using evolutionary computation and open-loop frequency response. In IEEE Aerospace Conference Proceedings (Vol. 2005). [1559562] https://doi.org/10.1109/AERO.2005.1559562

Tuning of MEMS devices using evolutionary computation and open-loop frequency response. / Keymeulen, Didier; Fink, Wolfgang; Ferguson, Michael I.; Peay, Chris; Oks, Boris; Terrile, Richard; Yee, Karl.

IEEE Aerospace Conference Proceedings. Vol. 2005 2005. 1559562.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Keymeulen, D, Fink, W, Ferguson, MI, Peay, C, Oks, B, Terrile, R & Yee, K 2005, Tuning of MEMS devices using evolutionary computation and open-loop frequency response. in IEEE Aerospace Conference Proceedings. vol. 2005, 1559562, 2005 IEEE Aerospace Conference, Big Sky, MT, United States, 3/5/05. https://doi.org/10.1109/AERO.2005.1559562
Keymeulen D, Fink W, Ferguson MI, Peay C, Oks B, Terrile R et al. Tuning of MEMS devices using evolutionary computation and open-loop frequency response. In IEEE Aerospace Conference Proceedings. Vol. 2005. 2005. 1559562 https://doi.org/10.1109/AERO.2005.1559562
Keymeulen, Didier ; Fink, Wolfgang ; Ferguson, Michael I. ; Peay, Chris ; Oks, Boris ; Terrile, Richard ; Yee, Karl. / Tuning of MEMS devices using evolutionary computation and open-loop frequency response. IEEE Aerospace Conference Proceedings. Vol. 2005 2005.
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