Two-dimensional small-rotation-angle measurement using an imaging method

Takamasa Suzuki, Takanori Endo, Osami Sasaki, John E. Greivenkamp

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

A two-dimensional mall-rotation-angle measurement system based on fringe projection is proposed and demonstrated. Simple and effective signal processing is described and applied to the angular calculation. Several measurements indicate a measurement accuracy of ≈-0.4 arcsec, which is comparable to that of a high-priced autocollimator. The two-dimensional two-pitch grating used in our prototype system provides a wide measurement range, which is expected to reach 1300 arcsec for both x- and y-direction rotations.

Original languageEnglish (US)
Article number043604
JournalOptical Engineering
Volume45
Issue number4
DOIs
StatePublished - Apr 1 2006

Keywords

  • Fourier transform method
  • Fringe projection
  • Rotation-angle measurement
  • Two-dimensional grating

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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