Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi, C. Y. Li, J. E. Chisham, Mark P. Andrews, P. Coudray, A. Malek-Tabrizi, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsS.Iraj Najafi, Mario N. Armenise
Pages38-41
Number of pages4
Volume2695
StatePublished - 1996
Externally publishedYes
EventFunctional Photonic and Fiber Devices - San Jose, CA, USA
Duration: Jan 30 1996Feb 1 1996

Other

OtherFunctional Photonic and Fiber Devices
CitySan Jose, CA, USA
Period1/30/962/1/96

Fingerprint

silica glass
Fused silica
ultraviolet radiation
Sol-gels
Waveguides
gels
waveguides
Silicon
silicon
Fabrication
fabrication
Buffer layers
coating
buffers
Glass
Coatings
glass
Substrates
Ultraviolet Rays
Costs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Najafi, S. I., Li, C. Y., Chisham, J. E., Andrews, M. P., Coudray, P., Malek-Tabrizi, A., & Peyghambarian, N. N. (1996). Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. In S. I. Najafi, & M. N. Armenise (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2695, pp. 38-41)

Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. / Najafi, S. Iraj; Li, C. Y.; Chisham, J. E.; Andrews, Mark P.; Coudray, P.; Malek-Tabrizi, A.; Peyghambarian, Nasser N.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / S.Iraj Najafi; Mario N. Armenise. Vol. 2695 1996. p. 38-41.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Najafi, SI, Li, CY, Chisham, JE, Andrews, MP, Coudray, P, Malek-Tabrizi, A & Peyghambarian, NN 1996, Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. in SI Najafi & MN Armenise (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 2695, pp. 38-41, Functional Photonic and Fiber Devices, San Jose, CA, USA, 1/30/96.
Najafi SI, Li CY, Chisham JE, Andrews MP, Coudray P, Malek-Tabrizi A et al. Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. In Najafi SI, Armenise MN, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2695. 1996. p. 38-41
Najafi, S. Iraj ; Li, C. Y. ; Chisham, J. E. ; Andrews, Mark P. ; Coudray, P. ; Malek-Tabrizi, A. ; Peyghambarian, Nasser N. / Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. Proceedings of SPIE - The International Society for Optical Engineering. editor / S.Iraj Najafi ; Mario N. Armenise. Vol. 2695 1996. pp. 38-41
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