Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon

P. Coudray, J. Chisham, A. Malek-Tabrizi, C. Y. Li, M. P. Andrews, N. Peyghambarian, S. I. Najafi

Research output: Contribution to journalArticlepeer-review

47 Scopus citations

Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment. Also, a 1 × 8 power splitter is produced by this process. The splitter exhibits relatively uniform output and a configuration loss of 0.9 dB at 1.55 μm wavelength.

Original languageEnglish (US)
Pages (from-to)19-22
Number of pages4
JournalOptics Communications
Volume128
Issue number1-3
DOIs
StatePublished - Jul 1 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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