Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces

Kashmira Tayabaly, John C. Stover, Robert E. Parks, Matthew Dubin, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

The Rayleigh Rice vector perturbation theory has been successfully used for several decades to relate the surface power spectrum of optically smooth reflectors to the angular resolved scatter resulting from light sources of known wavelength, incident angle and polarization. While measuring low frequency roughness is relatively easy, the corresponding near specular scatter can be difficult to measure. This paper discusses using high incident angle near specular measurements along with profile generated surface power spectrums as a means of checking a near specular scatter requirement. The specification in question, a BRDF of 1.0 sr-1 at 2 mrad from the specular direction and at a wavelength of 1μm, is very difficult to verify by conventional scatter measurements. In fact, it is impractical to directly measure surface scatter from uncoated Zerodur because of its high bulk scatter. This paper presents profilometer and scatterometer data obtained from coated and uncoated flats at several wavelengths and outlines the analysis technique used to check this tight specification.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing X
DOIs
StatePublished - Nov 28 2013
EventOptical Manufacturing and Testing X - San Diego, CA, United States
Duration: Aug 26 2013Aug 27 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8838
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherOptical Manufacturing and Testing X
CountryUnited States
CitySan Diego, CA
Period8/26/138/27/13

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Keywords

  • BRDF
  • Metrology
  • Near specular scatter
  • Rayleigh Rice
  • Surface power spectrum
  • Vector perturbation theory

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Tayabaly, K., Stover, J. C., Parks, R. E., Dubin, M., & Burge, J. H. (2013). Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. In Optical Manufacturing and Testing X [883805] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8838). https://doi.org/10.1117/12.2024612