Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces

Kashmira Tayabaly, John C. Stover, Robert E. Parks, Matthew B Dubin, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The Rayleigh Rice vector perturbation theory has been successfully used for several decades to relate the surface power spectrum of optically smooth reflectors to the angular resolved scatter resulting from light sources of known wavelength, incident angle and polarization. While measuring low frequency roughness is relatively easy, the corresponding near specular scatter can be difficult to measure. This paper discusses using high incident angle near specular measurements along with profile generated surface power spectrums as a means of checking a near specular scatter requirement. The specification in question, a BRDF of 1.0 sr-1 at 2 mrad from the specular direction and at a wavelength of 1μm, is very difficult to verify by conventional scatter measurements. In fact, it is impractical to directly measure surface scatter from uncoated Zerodur because of its high bulk scatter. This paper presents profilometer and scatterometer data obtained from coated and uncoated flats at several wavelengths and outlines the analysis technique used to check this tight specification.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8838
DOIs
StatePublished - 2013
EventOptical Manufacturing and Testing X - San Diego, CA, United States
Duration: Aug 26 2013Aug 27 2013

Other

OtherOptical Manufacturing and Testing X
CountryUnited States
CitySan Diego, CA
Period8/26/138/27/13

Fingerprint

Smooth surface
Scatter
Adjustment
adjusting
Power spectrum
Angle
Wavelength
power spectra
specifications
wavelengths
Specifications
scatterometers
profilometers
rice
Power Spectrum
reflectors
Light sources
light sources
roughness
perturbation theory

Keywords

  • BRDF
  • Metrology
  • Near specular scatter
  • Rayleigh Rice
  • Surface power spectrum
  • Vector perturbation theory

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Tayabaly, K., Stover, J. C., Parks, R. E., Dubin, M. B., & Burge, J. H. (2013). Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8838). [883805] https://doi.org/10.1117/12.2024612

Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. / Tayabaly, Kashmira; Stover, John C.; Parks, Robert E.; Dubin, Matthew B; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8838 2013. 883805.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tayabaly, K, Stover, JC, Parks, RE, Dubin, MB & Burge, JH 2013, Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8838, 883805, Optical Manufacturing and Testing X, San Diego, CA, United States, 8/26/13. https://doi.org/10.1117/12.2024612
Tayabaly K, Stover JC, Parks RE, Dubin MB, Burge JH. Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8838. 2013. 883805 https://doi.org/10.1117/12.2024612
Tayabaly, Kashmira ; Stover, John C. ; Parks, Robert E. ; Dubin, Matthew B ; Burge, James H. / Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8838 2013.
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