Very large format back illuminated CCDs

Michael Lesser

doi:10.1023/B:EXPA.0000004337.06411.0d

Very large format back illuminated CCDs

Michael Lesser

Steward Observatory

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically -100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.

Original language	English (US)
Pages (from-to)	77-82
Number of pages	6
Journal	Experimental Astronomy
Volume	14
Issue number	2
DOIs	https://doi.org/10.1023/B:EXPA.0000004337.06411.0d
State	Published - Oct 2002

Keywords

Astronomy
Charge-Coupled Device (CCD)
Detectors
Imaging
Silicon

ASJC Scopus subject areas

Astronomy and Astrophysics
Space and Planetary Science

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10.1023/B:EXPA.0000004337.06411.0d

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title = "Very large format back illuminated CCDs",

abstract = "The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically -100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.",

keywords = "Astronomy, Charge-Coupled Device (CCD), Detectors, Imaging, Silicon",

author = "Michael Lesser",

note = "Funding Information: This work was supported by the University of Arizona as well as contracts to the UA from Fairchild Imaging Systems, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The authors wish to thank all members of the UA Imaging Technology Laboratory for their work on VLF CCD processing; especially David Ouellette who designed the packages, Charles Bridges who developed the etching processes, and Teresa Lappin who applied the backside coatings. We also wish to thank Paul Vu at Fairchild Imaging Systems, Dr. Mark Wadsworth at the Jet Propulsion Laboratory, Dr. Richard Bredthauer at Semiconductor Technology Associates, and Dr. Franz Weber at Lawrence Livermore National Laboratory. The 7K × 9K development efforts were sponsored by Mr. Jim Foster of American Digital Imaging, Inc. Dr. Albert Theuwissen at Philips provided many helpful discussions regarding the 7K × 9K devices.",

year = "2002",

month = oct,

doi = "10.1023/B:EXPA.0000004337.06411.0d",

language = "English (US)",

volume = "14",

pages = "77--82",

journal = "Experimental Astronomy",

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AU - Lesser, Michael

N1 - Funding Information: This work was supported by the University of Arizona as well as contracts to the UA from Fairchild Imaging Systems, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The authors wish to thank all members of the UA Imaging Technology Laboratory for their work on VLF CCD processing; especially David Ouellette who designed the packages, Charles Bridges who developed the etching processes, and Teresa Lappin who applied the backside coatings. We also wish to thank Paul Vu at Fairchild Imaging Systems, Dr. Mark Wadsworth at the Jet Propulsion Laboratory, Dr. Richard Bredthauer at Semiconductor Technology Associates, and Dr. Franz Weber at Lawrence Livermore National Laboratory. The 7K × 9K development efforts were sponsored by Mr. Jim Foster of American Digital Imaging, Inc. Dr. Albert Theuwissen at Philips provided many helpful discussions regarding the 7K × 9K devices.

PY - 2002/10

Y1 - 2002/10

N2 - The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically -100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.

AB - The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically -100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.

KW - Astronomy

KW - Charge-Coupled Device (CCD)

KW - Detectors

KW - Imaging

KW - Silicon

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Very large format back illuminated CCDs

Abstract

Keywords

ASJC Scopus subject areas

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