Vibration-compensated interferometer for measuring cryogenic mirrors

Chunyu Zhao, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages399-406
Number of pages8
Volume3782
StatePublished - 1999
EventProceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA
Duration: Jul 20 1999Jul 23 1999

Other

OtherProceedings of the 1999 'Optical Manufacturing and Testing III'
CityDenver, CO, USA
Period7/20/997/23/99

Fingerprint

Interferometers
Cryogenics
cryogenics
interferometers
mirrors
vibration
Phase control
Phase measurement
Surface measurement
Digital signal processors
Speed control
Electrooptical effects
Space flight
Interferometry
Phase shift
Modulators
NASA
Calibration
X rays
phase control

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Zhao, C., & Burge, J. H. (1999). Vibration-compensated interferometer for measuring cryogenic mirrors. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3782, pp. 399-406). Society of Photo-Optical Instrumentation Engineers.

Vibration-compensated interferometer for measuring cryogenic mirrors. / Zhao, Chunyu; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. p. 399-406.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhao, C & Burge, JH 1999, Vibration-compensated interferometer for measuring cryogenic mirrors. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3782, Society of Photo-Optical Instrumentation Engineers, pp. 399-406, Proceedings of the 1999 'Optical Manufacturing and Testing III', Denver, CO, USA, 7/20/99.
Zhao C, Burge JH. Vibration-compensated interferometer for measuring cryogenic mirrors. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782. Society of Photo-Optical Instrumentation Engineers. 1999. p. 399-406
Zhao, Chunyu ; Burge, James H. / Vibration-compensated interferometer for measuring cryogenic mirrors. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 399-406
@inproceedings{b020b410e1b54788b21338d2873af369,
title = "Vibration-compensated interferometer for measuring cryogenic mirrors",
abstract = "An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.",
author = "Chunyu Zhao and Burge, {James H}",
year = "1999",
language = "English (US)",
volume = "3782",
pages = "399--406",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",

}

TY - GEN

T1 - Vibration-compensated interferometer for measuring cryogenic mirrors

AU - Zhao, Chunyu

AU - Burge, James H

PY - 1999

Y1 - 1999

N2 - An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.

AB - An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.

UR - http://www.scopus.com/inward/record.url?scp=0033347602&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033347602&partnerID=8YFLogxK

M3 - Conference contribution

VL - 3782

SP - 399

EP - 406

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - Society of Photo-Optical Instrumentation Engineers

ER -