Vibration stabilization of a phase shifting interferometer for large optics

Glen C. Cole, James H Burge, Lee R. Dettmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages438-446
Number of pages9
Volume3134
DOIs
StatePublished - 1997
EventOptical Manufacturing and Testing II - San Diego, CA, United States
Duration: Jul 27 1997Jul 27 1997

Other

OtherOptical Manufacturing and Testing II
CountryUnited States
CitySan Diego, CA
Period7/27/977/27/97

Fingerprint

Phase Shifting
Interferometry
Interferometer
Interferometers
Optics
Stabilization
Phase measurement
interferometers
Vibration
stabilization
optics
vibration
interferometry
Phase Measurement
Surface measurement
Servomechanisms
Closed-loop
high speed
Photodiodes
High Speed

Keywords

  • Interferometry
  • Large optics
  • Metrology
  • Phase shifting
  • Telescopes
  • Testing
  • Vibration

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Cole, G. C., Burge, J. H., & Dettmann, L. R. (1997). Vibration stabilization of a phase shifting interferometer for large optics. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3134, pp. 438-446) https://doi.org/10.1117/12.279132

Vibration stabilization of a phase shifting interferometer for large optics. / Cole, Glen C.; Burge, James H; Dettmann, Lee R.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134 1997. p. 438-446.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cole, GC, Burge, JH & Dettmann, LR 1997, Vibration stabilization of a phase shifting interferometer for large optics. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3134, pp. 438-446, Optical Manufacturing and Testing II, San Diego, CA, United States, 7/27/97. https://doi.org/10.1117/12.279132
Cole GC, Burge JH, Dettmann LR. Vibration stabilization of a phase shifting interferometer for large optics. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134. 1997. p. 438-446 https://doi.org/10.1117/12.279132
Cole, Glen C. ; Burge, James H ; Dettmann, Lee R. / Vibration stabilization of a phase shifting interferometer for large optics. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134 1997. pp. 438-446
@inproceedings{c9239e6aa171402f922153cab47d6a81,
title = "Vibration stabilization of a phase shifting interferometer for large optics",
abstract = "Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.",
keywords = "Interferometry, Large optics, Metrology, Phase shifting, Telescopes, Testing, Vibration",
author = "Cole, {Glen C.} and Burge, {James H} and Dettmann, {Lee R.}",
year = "1997",
doi = "10.1117/12.279132",
language = "English (US)",
volume = "3134",
pages = "438--446",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Vibration stabilization of a phase shifting interferometer for large optics

AU - Cole, Glen C.

AU - Burge, James H

AU - Dettmann, Lee R.

PY - 1997

Y1 - 1997

N2 - Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.

AB - Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.

KW - Interferometry

KW - Large optics

KW - Metrology

KW - Phase shifting

KW - Telescopes

KW - Testing

KW - Vibration

UR - http://www.scopus.com/inward/record.url?scp=0038312856&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038312856&partnerID=8YFLogxK

U2 - 10.1117/12.279132

DO - 10.1117/12.279132

M3 - Conference contribution

AN - SCOPUS:0038312856

VL - 3134

SP - 438

EP - 446

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -