Water dispersible silanes for wettability modification of polysilicon

A. Marcia Almanza-Workman, Srini Raghavan, Pierre A Deymier, David J. Monk, Ray Roop

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.

Original languageEnglish (US)
JournalJournal of the Electrochemical Society
Volume149
Issue number1
DOIs
StatePublished - Jan 2002

Fingerprint

Silanes
wettability
Polysilicon
silanes
Wetting
Cationic surfactants
Water
surfactants
water
stiction
Stiction
curing
pretreatment
Curing
chemistry
coatings
Coatings
Oxidation
oxidation
Substrates

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Water dispersible silanes for wettability modification of polysilicon. / Almanza-Workman, A. Marcia; Raghavan, Srini; Deymier, Pierre A; Monk, David J.; Roop, Ray.

In: Journal of the Electrochemical Society, Vol. 149, No. 1, 01.2002.

Research output: Contribution to journalArticle

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