Water dispersible silanes for wettability modification of polysilicon

A. Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop

Research output: Contribution to journalArticle

22 Scopus citations

Abstract

The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.

Original languageEnglish (US)
Pages (from-to)H6-H11
JournalJournal of the Electrochemical Society
Volume149
Issue number1
DOIs
StatePublished - Jan 1 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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