Wavelength corrected, non-polarizing heterodyne laser interferometry in air

Ki Nam Joo, Jonathan D. Ellis, J. W. Spronck, Robert H.Munnig Schmidt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research, we present a wavelength corrected, non-polarizing heterodyne laser interferometer for sub-nm accuracy. The basic concept of this interferometer consists of two ideas; one is to correct the optical frequency which can be shifted by the refractive index fluctuation of air in a Fabry-Perot etalon (FPE) and the other is to reduce periodic errors using spatially separated two frequency beams. The simulation and experimental results demonstrated sub-nm accuracy of the proposed interferometer.

Original languageEnglish (US)
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
Publishereuspen
Pages336-339
Number of pages4
ISBN (Electronic)9780955308260
StatePublished - Jan 1 2009
Externally publishedYes
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: Jun 2 2009Jun 5 2009

Publication series

NameProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Volume2

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period6/2/096/5/09

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering

Fingerprint Dive into the research topics of 'Wavelength corrected, non-polarizing heterodyne laser interferometry in air'. Together they form a unique fingerprint.

  • Cite this

    Joo, K. N., Ellis, J. D., Spronck, J. W., & Schmidt, R. H. M. (2009). Wavelength corrected, non-polarizing heterodyne laser interferometry in air. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (pp. 336-339). (Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009; Vol. 2). euspen.