We present the first demonstration of interlayer, or vertical, directional grating coupling using a permanently incorporated corrugated layer grating. Based on an InP/InGaAsP antiresonant reflecting optical waveguide (ARROW) geometry grown by chemical beam epitaxy and metalorganic chemical vapor deposition, we have achieved a large mode contradirectional grating-coupled waveguide photodetector with a spectral response peak 9 Å wide. The]] optical bus" capabilities of the vertically coupled ARROW structure make this device suitable for optical integration.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)