Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

Original languageEnglish (US)
Pages (from-to)23-26
Number of pages4
JournalDiffusion and Defect Data Pt.B: Solid State Phenomena
Volume76-77
StatePublished - Dec 1 2000
Event5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) - Ostend, Belgium
Duration: Sep 18 2000Sep 20 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures'. Together they form a unique fingerprint.

Cite this