Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre A Deymier, David J. Monk, Ray Roop

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

Original languageEnglish (US)
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
PublisherScitec Publications Ltd.
Pages23-26
Number of pages4
Volume76-77
StatePublished - 2000
Event5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) - Ostend, Belgium
Duration: Sep 18 2000Sep 20 2000

Other

Other5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000)
CityOstend, Belgium
Period9/18/009/20/00

Fingerprint

stiction
Stiction
Silicon
wettability
Polysilicon
Wetting
coatings
Coatings
silicon
Organic solvents
chemistry
Substrates

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Almanza-Workman, A. M., Raghavan, S., Deymier, P. A., Monk, D. J., & Roop, R. (2000). Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures. In Diffusion and Defect Data Pt.B: Solid State Phenomena (Vol. 76-77, pp. 23-26). Scitec Publications Ltd..

Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures. / Almanza-Workman, Angeles Marcia; Raghavan, Srini; Deymier, Pierre A; Monk, David J.; Roop, Ray.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77 Scitec Publications Ltd., 2000. p. 23-26.

Research output: Chapter in Book/Report/Conference proceedingChapter

Almanza-Workman, AM, Raghavan, S, Deymier, PA, Monk, DJ & Roop, R 2000, Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures. in Diffusion and Defect Data Pt.B: Solid State Phenomena. vol. 76-77, Scitec Publications Ltd., pp. 23-26, 5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), Ostend, Belgium, 9/18/00.
Almanza-Workman AM, Raghavan S, Deymier PA, Monk DJ, Roop R. Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures. In Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77. Scitec Publications Ltd. 2000. p. 23-26
Almanza-Workman, Angeles Marcia ; Raghavan, Srini ; Deymier, Pierre A ; Monk, David J. ; Roop, Ray. / Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77 Scitec Publications Ltd., 2000. pp. 23-26
@inbook{8c351bc81ce34909a671a88fdc565386,
title = "Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures",
abstract = "Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.",
author = "Almanza-Workman, {Angeles Marcia} and Srini Raghavan and Deymier, {Pierre A} and Monk, {David J.} and Ray Roop",
year = "2000",
language = "English (US)",
volume = "76-77",
pages = "23--26",
booktitle = "Diffusion and Defect Data Pt.B: Solid State Phenomena",
publisher = "Scitec Publications Ltd.",

}

TY - CHAP

T1 - Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

AU - Almanza-Workman, Angeles Marcia

AU - Raghavan, Srini

AU - Deymier, Pierre A

AU - Monk, David J.

AU - Roop, Ray

PY - 2000

Y1 - 2000

N2 - Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

AB - Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

UR - http://www.scopus.com/inward/record.url?scp=18744424120&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18744424120&partnerID=8YFLogxK

M3 - Chapter

AN - SCOPUS:18744424120

VL - 76-77

SP - 23

EP - 26

BT - Diffusion and Defect Data Pt.B: Solid State Phenomena

PB - Scitec Publications Ltd.

ER -