Wide range two-dimensional small rotation-angle measurement by use of fringe projection

Takamasa Suzuki, Takanori Endo, John E. Greivenkamp, Osami Sasaki

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

A system for two-dimensional small rotation-angle measurement is proposed and demonstrated. Because the measurement is not conducted by the interference but the fringe projection, it is basically robust for the external disturbance. While the setup is very simple, there is no requirement on the size of the object. We also proposed two-dimensional two-grating method and a unit that miniaturizes the system. Several measurements confirm us that the measurement accuracy of our proposed system is ∼0.4 arcsec.

Original languageEnglish (US)
Article number100
Pages (from-to)185-192
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5633
DOIs
StatePublished - Jun 14 2005
EventAdvanced Materials and Devices for Sensing and Imaging II - Beijing, China
Duration: Nov 8 2004Nov 10 2004

Keywords

  • Autocollimator
  • Fringe projection
  • Rotation-angle measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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