Writing an arbitrary non-periodic pattern using interference lithography

Stanley K H Pau, G. P. Watson, O. Nalamasu

Research output: Contribution to journalArticlepeer-review

Abstract

We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities.

Original languageEnglish (US)
Pages (from-to)1211-1223
Number of pages13
JournalJournal of Modern Optics
Volume48
Issue number7
DOIs
StatePublished - 2001
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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