X-ray mirror metrology using SCOTS/deflectometry

Run Huang, Peng Su, James H Burge, Mourad Idir

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a 'virtual null' test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8848
DOIs
StatePublished - 2013
EventAdvances in X-Ray/EUV Optics and Components VIII - San Diego, CA, United States
Duration: Aug 26 2013Aug 28 2013

Other

OtherAdvances in X-Ray/EUV Optics and Components VIII
CountryUnited States
CitySan Diego, CA
Period8/26/138/28/13

Fingerprint

X-ray Mirror
Metrology
metrology
Mirrors
mirrors
X rays
Liquid crystal displays
Optics
x rays
Slope
Null
Mirror
slopes
Cameras
Display devices
Calibration
Imaging techniques
High Dynamic Range
optics
Testing

Keywords

  • Optical metrology
  • X-ray optics

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Huang, R., Su, P., Burge, J. H., & Idir, M. (2013). X-ray mirror metrology using SCOTS/deflectometry. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8848). [88480G] https://doi.org/10.1117/12.2024500

X-ray mirror metrology using SCOTS/deflectometry. / Huang, Run; Su, Peng; Burge, James H; Idir, Mourad.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8848 2013. 88480G.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Huang, R, Su, P, Burge, JH & Idir, M 2013, X-ray mirror metrology using SCOTS/deflectometry. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8848, 88480G, Advances in X-Ray/EUV Optics and Components VIII, San Diego, CA, United States, 8/26/13. https://doi.org/10.1117/12.2024500
Huang R, Su P, Burge JH, Idir M. X-ray mirror metrology using SCOTS/deflectometry. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8848. 2013. 88480G https://doi.org/10.1117/12.2024500
Huang, Run ; Su, Peng ; Burge, James H ; Idir, Mourad. / X-ray mirror metrology using SCOTS/deflectometry. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8848 2013.
@inproceedings{500d6d9a33b84421ba1d4b4564c0d4a9,
title = "X-ray mirror metrology using SCOTS/deflectometry",
abstract = "SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a 'virtual null' test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.",
keywords = "Optical metrology, X-ray optics",
author = "Run Huang and Peng Su and Burge, {James H} and Mourad Idir",
year = "2013",
doi = "10.1117/12.2024500",
language = "English (US)",
isbn = "9780819496980",
volume = "8848",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - X-ray mirror metrology using SCOTS/deflectometry

AU - Huang, Run

AU - Su, Peng

AU - Burge, James H

AU - Idir, Mourad

PY - 2013

Y1 - 2013

N2 - SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a 'virtual null' test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.

AB - SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a 'virtual null' test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.

KW - Optical metrology

KW - X-ray optics

UR - http://www.scopus.com/inward/record.url?scp=84888865044&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84888865044&partnerID=8YFLogxK

U2 - 10.1117/12.2024500

DO - 10.1117/12.2024500

M3 - Conference contribution

SN - 9780819496980

VL - 8848

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -